JPH0410504Y2 - - Google Patents

Info

Publication number
JPH0410504Y2
JPH0410504Y2 JP1986017169U JP1716986U JPH0410504Y2 JP H0410504 Y2 JPH0410504 Y2 JP H0410504Y2 JP 1986017169 U JP1986017169 U JP 1986017169U JP 1716986 U JP1716986 U JP 1716986U JP H0410504 Y2 JPH0410504 Y2 JP H0410504Y2
Authority
JP
Japan
Prior art keywords
air
clean room
air conditioner
room
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986017169U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62130331U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986017169U priority Critical patent/JPH0410504Y2/ja
Publication of JPS62130331U publication Critical patent/JPS62130331U/ja
Application granted granted Critical
Publication of JPH0410504Y2 publication Critical patent/JPH0410504Y2/ja
Expired legal-status Critical Current

Links

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  • Ventilation (AREA)
JP1986017169U 1986-02-08 1986-02-08 Expired JPH0410504Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986017169U JPH0410504Y2 (en]) 1986-02-08 1986-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986017169U JPH0410504Y2 (en]) 1986-02-08 1986-02-08

Publications (2)

Publication Number Publication Date
JPS62130331U JPS62130331U (en]) 1987-08-18
JPH0410504Y2 true JPH0410504Y2 (en]) 1992-03-16

Family

ID=30809681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986017169U Expired JPH0410504Y2 (en]) 1986-02-08 1986-02-08

Country Status (1)

Country Link
JP (1) JPH0410504Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0526422Y2 (en]) * 1985-08-20 1993-07-05
JP2609688B2 (ja) * 1988-07-14 1997-05-14 日立プラント建設株式会社 クリーンルーム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148525U (ja) * 1982-03-30 1983-10-05 株式会社大林組 超清浄空気室構造
JPS59185923A (ja) * 1983-04-07 1984-10-22 Sanki Eng Co Ltd クリーンルームの形成方法

Also Published As

Publication number Publication date
JPS62130331U (en]) 1987-08-18

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